Shared by:oxx78
Written by Ki Bang Lee
Edition: 2011
Format(s): PDF
Language: English
Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications.
Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes:
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Statics/force and moment acting on mechanical structures in static equilibrium
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Static behaviors of structures consisting of mechanical elements
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Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations
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Fluid flow in MEMS and the evaluation of damping force acting on the moving structures
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Basic equations of electromagnetics that govern the electrical behavior of MEMS
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Combining the MEMS building blocks to form actuators and sensors for a specific purpose
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